Microfabrication Laboratory
ENG-SCI 277
Subject & Catalog Number
Course Information
Description
The course provides introduction to micro- and nano-fabrication processes used to realize photonic, electronic and mechanical devices. Lectures will introduce the state-of-the-art semiconductor fabrication processes, including lithography, deposition of metals and dielectrics, etching, oxidation, implantation, and diffusion of dopants. The fabrication component of the course will be carried out in a state-of-the-art cleanroom in the Center for Nanoscale Systems, where students will fabricate several electronic and photonic devices, including transistors, light-emitting diodes (LEDs), lasers and optical resonators. Device characterization will be performed in a state-of-the-art teaching labs in SEC in Allston.
Course Notes
Course also includes a 4-hour lab session each week. Content and requirements are similar to Engineering Sciences 177, with the addition that students enrolled in Engineering Sciences 277 are given an additional project. Course cap is for ES 177 and ES 277 combined.
Available for Harvard Cross Registration
NOTE: This course requires additional sections; you will be prompted to choose secondary components during the Add to Cart process
