Microfabrication Laboratory
ENG-SCI 177
Subject & Catalog Number
Course Information
Description
The course provides introduction to micro- and nano-fabrication processes used to realize photonic, electronic and mechanical devices. Lectures will introduce the state-of-the-art semiconductor fabrication processes, including lithography, deposition of metals and dielectrics, etching, oxidation, implantation, and diffusion of dopants. The fabrication component of the course will be carried out in a state-of-the-art cleanroom in the Center for Nanoscale Systems, where students will fabricate several electronic and photonic devices, including transistors, light-emitting diodes (LEDs), lasers and optical resonators. Device characterization will be performed in a state-of-the-art teaching labs in SEC in Allston.
Course Notes
Course also includes a 4-hour lab session each week. Course cap is for ES 177 and ES 277 combined.
Available for Harvard Cross Registration
NOTE: This course requires additional sections; you will be prompted to choose secondary components during the Add to Cart process
